false
false
false
Spin-on Glass (SOG)
ACCUGLASS® P114A
Spin-on Glass (SOG) Series P-TTY
Please sign in to access more documents
Once signed in, you may be able to access additional documents for your account.
Overview
The ACCUGLASS P-TTY Spin-on Glass (SOG) Series (κ = 4.1-4.3) is a family of phosphosilicate polymers used for metal and poly planarization, overcoat passivation and non-etchback interlayer dielectric in the manufacture of integrated circuits.
Specifications
General Information
- Application
- Gap Fill
- Brand
- ACCUGLASS®
General Information
- Application
- Gap Fill
- Brand
- ACCUGLASS®
- Brand : ACCUGLASS®
- Application : Gap Fill
Others
Name
Description
File Size
Date
Size
PMD-BPSG planarization
application/pdf 579.19 KB
10/31/2023
579.19 KB
Name
Description
File Size
Date
Size
PMD-BPSG planarization
application/pdf 579.19 KB
10/31/2023
579.19 KB
Name
Description
File Size
Date
Size
