Buffered Oxide Etchants
Ammonium Fluoride Etching Mixture (17313)
AWAP 750-200-50 VLSI Puranal
Please sign in to access more documents
Once signed in, you may be able to access additional documents for your account.
Overview
Specifications
General Information
- Grade
- VLSI
- Synonyms
- Ammonium fluorure
- Etchant
Physical Properties
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.100 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
International Transportation
- Chemical Class
- 6.1
- Harmonized System Code
- 38249996
- Packing Group
- III
- UN Number
- 3287
General Information
- Grade
- VLSI
- Synonyms
- Ammonium fluorure
- Etchant
Physical Properties
- Boiling Point/Range
- 100 °C (1,013 hPa)
- Color
- Colorless
- Density
- 1.100 g/cm3 (20 °C)
- Flashpoint
- Not applicable
- Melting Point/Range
- No data available
- Odor
- Odorless
- Physical Form
- Liquid
- Solubility in Water
- Completely miscible
Safety Information
- Chemical Stability
- Stable under normal conditions.
- Ignition Temperature
- Not applicable
- Incompatible Materials
- Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
International Transportation
- Chemical Class
- 6.1
- Harmonized System Code
- 38249996
- Packing Group
- III
- UN Number
- 3287
- Synonyms : Ammonium fluorure|Etchant
- Grade : VLSI
- Physical Form : Liquid
- Odor : Odorless
- Flashpoint : Not applicable
- Density : 1.100 g/cm3 (20 °C)
- Solubility in Water : Completely miscible
- Color : Colorless
- Boiling Point/Range : 100 °C (1,013 hPa)
- Melting Point/Range : No data available
- Ignition Temperature : Not applicable
- Incompatible Materials : Corrosive in contact with metals, Contact with strong acids liberates hydrogen fluoride, Glass and silicate-containing materials are attacked
- Chemical Stability : Stable under normal conditions.
- Packing Group : III
- Harmonized System Code : 38249996
- UN Number : 3287
- Chemical Class : 6.1
