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Sputtering Targets and Coil Sets

Tantalum (Ta) Coilset

A full range of 200mm and 300mm coil sets in Tantalum (Ta) are available in a variety of configurations, purity and surface treatments

Overview
Specifications

General Information

  • Application
    • Electronics circuitry
  • Brand
    • Honeywell

General Information

  • Application
    • Electronics circuitry
  • Brand
    • Honeywell
  • Brand : Honeywell
  • Application : Electronics circuitry
Sales Sheet
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
application/pdf 426.48 KB
10/31/2023
426.48 KB
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
application/pdf 426.48 KB
10/31/2023
426.48 KB
Name
Description
File Size
Date
Size
High purity IMP coil sets for Vectra™ and Electra® process chambers
426.48 KB
10/31/2023